Facilities

Facilities

Main facility
PLD Chamber 1Pulsed Laser Deposition Chamber #1

w/ RHEED

4 targets

Programmable superlattice synthesis

PLD Chamber 2Pulsed Laser Deposition Chamber #2

w/ High-pressure RHEED

4 targets

PLD Chamber 3Pulsed Laser Deposition Chamber #3

w/ High-pressure RHEED

4 targets

Excimer Laser 1Excimer Laser #1

Coherent COMPexPRO 201

Excimer Laser 2Excimer Laser #2

Coherent COMPexPRO 205F

AFMAtomic Force Microscope

Park Systems

Probe StationProbe Station & Electronics

Impedance analyzer

TF analyzer 3000e (aixACCT Systems)

Picoammeter

Tube FurnaceTube Furnace

/w O2 flow regulator

Max Temperature: 1200˚C